Nikkiso has successfully developed a miniature pump that can supply not only liquid but also gas, and was exhibited at the 16th Microcomputer Exhibition. The flow rate is 1 μl / min to 50 μl / min, and the flow rate can be controlled by the driving frequency. Medical devices for analysis. Driving voltage is 120V, power consumption is 10μW. Overall dimensions of 22mm × 16.5mm × 4mm. Sample supply has now started. The development of the micro-pump working principle is: the use of piezoelectric elements up to drive the diaphragm to inhale liquid or gas, on the contrary by driving down the diaphragm to discharge liquid or gas. Diaphragm for the single crystal silicon material, the surrounding glass cover the bottom of the diaphragm in the design of a piezoelectric element. The company uses MEMS technology to process micropumps. This time by increasing the pressure applied to drive the diaphragm down to achieve the discharge of gas, the maximum pressure of 30kPa. The company's original product, the pressure is small, even if the gas pressure, the gas will not be discharged due to compression. This time through the refinement of liquid and gas flow path to improve the diaphragm pressure generated by driving. In addition, the micro pump can be used in conjunction with two. In this way, through the diaphragm-driven linkage, you can reduce the liquid or gas flow changes that pulse flow phenomenon.

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